High-temperature ceramic pressure sensor
- 31 May 1997
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 60 (1-3), 72-75
- https://doi.org/10.1016/s0924-4247(96)01438-0
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Characterization of tantalum oxynitride thin films as high-temperature strain gaugesSensors and Actuators A: Physical, 1995
- Ceramic pressure sensor based on tantalum thin filmSensors and Actuators A: Physical, 1994