Residual compressive stress in sputter-deposited TiC films on steel substrates
- 1 March 1981
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 78 (1), 25-34
- https://doi.org/10.1016/0040-6090(81)90414-4
Abstract
No abstract availableThis publication has 15 references indexed in Scilit:
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