Reactivity sputtered tantalum thin film resistors Part 1. Physical and electrical properties
- 31 August 1971
- journal article
- Published by Elsevier BV in Thin Solid Films
- Vol. 8 (2), 81-100
- https://doi.org/10.1016/0040-6090(71)90001-0
Abstract
No abstract availableKeywords
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