Highly tetrahedral, diamond-like amorphous hydrogenated carbon prepared from a plasma beam source
- 23 May 1994
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 64 (21), 2797-2799
- https://doi.org/10.1063/1.111428
Abstract
A highly tetrahedral, diamond‐like form of hydrogenated amorphous carbon (a‐C:H) with density of 2.9 g cm−3, sp3 fraction of 0.75, and hardness of 61 GPa, the highest values so far attained from a hydrocarbon source gas, has been deposited from acetylene in a novel plasma beam source. The ion energy for highest sp3 fraction is measured to be about 100 eV per C atom, similar to that for a‐C, indicating that the subplantation deposition model of a‐C also describes a‐C:H.Keywords
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