Cathodic arc plasma deposition technology
- 1 December 1988
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 167 (1-2), 175-186
- https://doi.org/10.1016/0040-6090(88)90494-4
Abstract
No abstract availableThis publication has 8 references indexed in Scilit:
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- Cathode spot erosion and ionization phenomena in the transition from vacuum to atmospheric pressure arcsJournal of Applied Physics, 1974