Sputtering Yields of Alkali Halide Single Crystals Bombarded by 2- to 10-keV Ions
- 1 May 1965
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 36 (5), 1678-1679
- https://doi.org/10.1063/1.1703107
Abstract
Fresh (100) cleavage faces of sodium chloride, potassium chloride, potassium bromide, and lithium fluoride single crystals were bombarded by Ar+ ions under normal incidence. Sputtering yields for these crystals in the energy range from 2 to 10 keV are between 0.30 and 2.15 atoms per ion. The ion bombardment apparatus and experimental conditions are briefly described.Keywords
This publication has 4 references indexed in Scilit:
- Modulation Broadening of NMR and ESR Line ShapesJournal of Applied Physics, 1963
- Sputtering Experiments with 1- to 5-keV Ar+ IonsJournal of Applied Physics, 1963
- Sputtering of Vitreous Silica by 20- to 60-kev Xe+ IonsJournal of Applied Physics, 1961
- Energieverteilung der Argon- und Wasserstoffionen aus einer HochfrequenzionenquelleZeitschrift für Naturforschung A, 1961