Hydrogen atom abstraction from SiH3Cl by CF3 radicals ����������������� CF3 + SiH3Cl → CF3H+SiH2Cl������������������� (1) has been studied in the temperature range 69-168�. The rate constant, based on Ayscough's value of 1013.36 cm3 mol-1 s-1 for the recombination of CF3 radicals, is given by (k1 in cm3 mol-1 s-1, E in kJ mol-1): ������������������ logk1 = (12.38�0.06)-(25.72�0.41)/2.303RT At 400 K, the rate constant for CF3 + SiH3Cl is greater than the average value reported for CF3+SiHCl3 by a factor of 3.6. This is due to a difference in A factors since the activation energies are equal within experimental error.