Growth of highly c-axis textured AlN films on Mo electrodes for film bulk acoustic wave resonators
- 13 November 2002
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 21 (1), 1-5
- https://doi.org/10.1116/1.1521961
Abstract
No abstract availableThis publication has 8 references indexed in Scilit:
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