A low-voltage torsional actuator for application in RF-microswitches
- 1 August 2001
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 92 (1-3), 312-317
- https://doi.org/10.1016/s0924-4247(01)00589-1
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Acceleration threshold switches from an additive electroplating MEMS processSensors and Actuators A: Physical, 2000
- Micromechanical relay with electrostatic actuation and metallic contactsJournal of Micromechanics and Microengineering, 1999
- Micromachined low-loss microwave switchesJournal of Microelectromechanical Systems, 1999