Effects of inert gas dilution of silane on plasma-deposited a-Si:H films
- 1 March 1981
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 38 (5), 331-333
- https://doi.org/10.1063/1.92359
Abstract
Electrical, optical, and structural characterization of hydrogenated amorphous silicon films plasma‐deposited from mixtures of SiH4 with different inert‐gas diluents reveals substantial differences in a number of properties. A general trend of increasing defect density with atomic weight of the inert gas is observed. Of specific interest to device applications is the observation that high deposition rates can be achieved concurrently with low defect densities when helium is used as a deluent.Keywords
This publication has 5 references indexed in Scilit:
- Proton Magnetic Resonance Spectra of Plasma-Deposited Amorphous Si: H FilmsPhysical Review Letters, 1980
- A-Si thin film as a photo-receptor for electrophotographyJournal of Non-Crystalline Solids, 1980
- Microstructure of plasma-deposited a-Si : H filmsApplied Physics Letters, 1979
- Structural interpretation of the vibrational spectra of-Si: H alloysPhysical Review B, 1979
- Luminescence studies of plasma-deposited hydrogenated siliconPhysical Review B, 1978