Microcalorimeter energy‐dispersive spectrometry using a low voltage scanning electron microscope
- 1 July 2000
- journal article
- Published by Wiley in Journal of Microscopy
- Vol. 199 (1), 37-44
- https://doi.org/10.1046/j.1365-2818.2000.00705.x
Abstract
We describe the current performance of the prototype microcalorimeter energy-dispersive spectrometer (&mgr;cal EDS) developed at NIST for X-ray microanalysis. We show that the low-energy &mgr;cal EDS, designed for operation in the energy range 0.2-2 keV, offers significant advantages for low-beam-energy microanalysis. We present several examples in which the prototype &mgr;cal EDS has been used to solve problems in low-voltage microanalysis, including the analysis of tungsten silicide (WSi2), titanium nitride (TiN) and barium titanate (BaTiO3) and the measurement of chemical shifts in Fe and C compounds.Keywords
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