Thermal Oxidation Kinetics of Silicon in Pyrogenic H 2 O and 5% HCl / H 2 O Mixtures
- 1 April 1978
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 125 (4), 576-579
- https://doi.org/10.1149/1.2131502