Secondary ion mass spectrometry–spreading resistance profiling study on the outdiffusion from poly- and monocrystalline cobaltsilicide
- 1 January 1992
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 10 (1), 524-532
- https://doi.org/10.1116/1.586386