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Change of Apparent Sensitivity of an Electron Resist Due to Backing Materials
Home
Publications
Change of Apparent Sensitivity of an Electron Resist Due to Backing Materials
Change of Apparent Sensitivity of an Electron Resist Due to Backing Materials
NS
Norio Saitou
Norio Saitou
CM
Chusuke Munakata
Chusuke Munakata
YH
Yukio Honda
Yukio Honda
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1 July 1972
journal article
Published by
IOP Publishing
in
Japanese Journal of Applied Physics
Vol. 11
(7)
,
1061-1062
https://doi.org/10.1143/jjap.11.1061
Abstract
No abstract available
Keywords
APPARENT SENSITIVITY
BACKING MATERIALS
ELECTRON RESIST DUE
DUE TO BACKING
Cited by 1 article