Time-of-Flight Method of Determining Velocities of Sputtered Atoms

Abstract

A method is described whereby velocities of sputtered atoms are determined by pulsing a target and measuring the transit time of sputtered atoms. The method permits determination of the distribution of velocities of sputtered atoms. The target pulse generator and the problems involved in pulsing a target are discussed. The photon‐counting system used for determining transit times is described and a typical set of data is presented.