Interaction ofwith: Solution of the Barrier Puzzle
- 17 July 2000
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review Letters
- Vol. 85 (3), 618-621
- https://doi.org/10.1103/physrevlett.85.618
Abstract
The sticking probability of on Si(001) is immeasurably small at room temperature, indicating the presence of a large energy barrier to adsorption. Surprisingly, the final state energy distributions of molecules desorbing from Si(001) show no signs of having traversed such a barrier, in apparent contradiction with microscopic reversibility. Here we report experimental and theoretical evidence resolving this long-standing puzzle. Adsorption and desorption proceeding along two distinct, microscopically reversible pathways can explain all observations.
Keywords
This publication has 25 references indexed in Scilit:
- Hydrogen interaction with clean and modified silicon surfacesSurface Science Reports, 1999
- Ab InitioMolecular Dynamics Study of the Desorption offrom Si(100)Physical Review Letters, 1997
- Reaction dynamics of molecular hydrogen on silicon surfacesPhysical Review B, 1996
- D2 dissociative adsorption on and associative desorption from Si(100): Dynamic consequences of an ab initio potential energy surfaceThe Journal of Chemical Physics, 1996
- Adsorption of hydrogen and disilane on Si(100) and SiGe surfacesSurface Science, 1994
- Hydrogen adsorption on and desorption from Si: Considerations on the applicability of detailed balance.Physical Review Letters, 1994
- Desorption of hydrogen from Si(100)2×1 at low coverages: The influence of π-bonded dimers on the kineticsPhysical Review B, 1992
- Internal-state distribution of recombinative hydrogen desorption from Si(100)The Journal of Chemical Physics, 1992
- Comparison of hydrogen desorption kinetics from Si(111)7 × 7 and Si(100)2 × 1Surface Science, 1991
- Kinetics of silicon epitaxy using SiH4 in a rapid thermal chemical vapor deposition reactorApplied Physics Letters, 1990