Rankings
Publications
Search Publications
Cited-By Search
Sources
Publishers
Scholars
Scholars
Top Cited Scholars
Organizations
About
Login
Register
Home
Publications
Damascene copper electroplating for chip interconnections
Home
Publications
Damascene copper electroplating for chip interconnections
Damascene copper electroplating for chip interconnections
PA
P. C. Andricacos
P. C. Andricacos
CU
C. Uzoh
C. Uzoh
JD
J. O. Dukovic
J. O. Dukovic
JH
J. Horkans
J. Horkans
HD
H. Deligianni
H. Deligianni
Publisher Website
Google Scholar
Add to Library
Cite
Download
Share
Download
1 September 1998
journal article
Published by
IBM
in
IBM Journal of Research and Development
Vol. 42
(5)
,
567-574
https://doi.org/10.1147/rd.425.0567
Abstract
No abstract available
Cited by 1056 articles