The electrostatic deflection of sputtered ions by the incident sputtering beam
- 17 September 1971
- journal article
- Published by IOP Publishing in Journal of Physics C: Solid State Physics
- Vol. 4 (13), L263-L265
- https://doi.org/10.1088/0022-3719/4/13/004
Abstract
It is shown that deflections of many degrees can occur in the trajectories of sputtered ions due to electrostatic interaction with the incident ion beam.Keywords
This publication has 1 reference indexed in Scilit:
- Mass and energy analysis of positive ions emitted from metallic targets bombarded by heavy ions in the keV energy regionCanadian Journal of Physics, 1968