Carrier Traps in Poly-p-Xylylene Films

Abstract

The X-ray induced TSC and TL and the dielectric loss of the vapour-deposited poly-p-xylylene (PPX) film have been studied. The TSC in a PPX film with a prior X-ray irradiation showed five peaks, designated C₁ to C₅ and they were due to trapped carriers introduced by the X-ray irradiation. The C₂ and C₅ peaks corresponded to the dielectric loss peaks, the γ and β relaxations, suggesting the carrier detrapping assisted by the release of molecular motions. The C₁ peak suggested the existence of a new relaxation around 120 K. There were no relaxations corresponding to the C₃ and C₄ peaks and carriers were considered to be thermally released from traps whose depths were 0.5–0.6 eV.