Commercial vision of silicon-based inertial sensors
- 1 April 1998
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 66 (1-3), 231-236
- https://doi.org/10.1016/s0924-4247(98)00048-x
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Impact of MEMS technology on societySensors and Actuators A: Physical, 1996
- Surface micromachined accelerometersIEEE Journal of Solid-State Circuits, 1996
- Vibrating Silicon MicrogyroscopeIEEJ Transactions on Sensors and Micromachines, 1996