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Plasma-Assisted Etching in Microfabrication
Home
Publications
Plasma-Assisted Etching in Microfabrication
Plasma-Assisted Etching in Microfabrication
JC
J W Coburn
J W Coburn
HW
H F Winters
H F Winters
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1 August 1983
journal article
Published by
Annual Reviews
in
Annual Review of Materials Science
Vol. 13
(1)
,
91-116
https://doi.org/10.1146/annurev.ms.13.080183.000515
Abstract
No abstract available
Keywords
PLASMA ASSISTED ETCHING IN MICROFABRICATION
Cited by 70 articles