TFA image sensors: from the one transistor cell to a locally adaptive high dynamic range sensor
- 23 November 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- No. 01631918,p. 209-212
- https://doi.org/10.1109/iedm.1997.650341
Abstract
TFA (Thin Film on ASIC) image sensors consist of an amorphous silicon (a-Si:H) based optical detector on top of an ASIC which performs signal readout or signal processing for each individual pixel. In this paper we present recent prototypes of image sensors in TFA technology. The ASICs have been fabricated in a standard 0.7 /spl mu/m CMOS process, the detector multilayer was deposited by Plasma Enhanced Chemical Vapor Deposition (PECVD).Keywords
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