Conductive and transparent multilayer films for low-temperature TiO2/Ag/SiO2 electrodes by E-beam evaporation with IAD
Open Access
- 16 January 2014
- journal article
- Published by Springer Science and Business Media LLC in Nanoscale Research Letters
- Vol. 9 (1), 35
- https://doi.org/10.1186/1556-276x-9-35
Abstract
Conductive and transparent multilayer thin films consisting of three alternating layers (TiO2/Ag/SiO2, TAS) have been fabricated for applications as transparent conducting oxides. Metal oxide and metal layers were prepared by electron-beam evaporation with ion-assisted deposition, and the optical and electrical properties of the resulting films as well as their energy bounding characteristics and microstructures were carefully investigated. The optical properties of the obtained TAS material were compared with those of well-known transparent metal oxide glasses such as ZnO/Ag/ZnO, TiO2/Ag/TiO2, ZnO/Cu/ZnO, and ZnO/Al/ZnO. The weathering resistance of the TAS film was improved by using a protective SiO2 film as the uppermost layer. The transmittance spectra and sheet resistance of the material were carefully measured and analyzed as a function of the layer thickness. By properly adjusting the thickness of the metal and dielectric films, a low sheet resistance of 6.5 ohm/sq and a high average transmittance of over 89% in the 400 to 700 nm wavelength regions were achieved. We found that the Ag layer played a significant role in determining the optical and electrical properties of this film.Keywords
This publication has 14 references indexed in Scilit:
- Study of a sandwich structure of transparent conducting oxide films prepared by electron beam evaporation at room temperatureNanoscale Research Letters, 2012
- Photoemission Electron Microscopy of TiO2 Anatase Films Embedded with Rutile NanocrystalsAdvanced Functional Materials, 2007
- The effect of the amorphous insulator layer on conduction behaviors of the silica/indium tin oxide two-layer filmsThin Solid Films, 2003
- Characteristics of Indium-Tin-Oxide/Silver/Indium-Tin-Oxide Sandwich Films and Their Application to Simple-Matrix Liquid-Crystal DisplaysJapanese Journal of Applied Physics, 2001
- Development of multilayer transparent conductive coatingsSolid State Ionics, 2000
- Dependence of the electrical and optical behaviour of ITO–silver–ITO multilayers on the silver propertiesThin Solid Films, 2000
- Dependence of film composition and thicknesses on optical and electrical properties of ITO–metal–ITO multilayersThin Solid Films, 1998
- Influence of vapor deposition parameters on SERS active Ag film morphology and optical propertiesAnalytical Chemistry, 1994
- Influence of the silver layer on the optical properties of the TiO2/Ag/TiO2 multilayerThin Solid Films, 1991
- Photoenhance migration of silver atoms in transparent heat mirror coatingsThin Solid Films, 1984