A New Model of Anomalous Phosphorus Diffusion in Silicon

Publisher Website

1 January 1989

journal article
Published by Trans Tech Publications, Ltd. in Materials Science Forum

Vol. 38-41, 719-724
https://doi.org/10.4028/www.scientific.net/msf.38-41.719

Abstract

No abstract available

Keywords

PHOSPHORUS

Cited by 11 articles