First integrated inductive proximity sensor with on-chip CMOS readout circuit and electrodeposited 1 mm flat coil
- 1 August 1999
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 76 (1-3), 273-278
- https://doi.org/10.1016/s0924-4247(99)00049-7
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- High-resolution miniaturized inductive proximity sensor: characterization and application for step-motor controlSensors and Actuators A: Physical, 1998
- Eddy current microsensor for use in micromachine applicationsPublished by SPIE-Intl Soc Optical Eng ,1997
- Inductive proximity sensor with a flat coil and a new differential relaxation oscillatorSensors and Actuators A: Physical, 1997
- A differential relaxation oscillator as a versatile electronic interface for sensorsSensors and Actuators A: Physical, 1997