Use of Schottky-diode collectors for SEM determination of bulk diffusion lengths
- 1 February 1974
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 24 (3), 125-126
- https://doi.org/10.1063/1.1655120
Abstract
Schottky diodes were used as collectors in the determination of bulk hole diffusion lengths (Lhn) by means of a scanning electron microscope in the beam‐induced current mode. The scans were performed on cross sections obtained by cleavage along a plane perpendicular to the metal layer. For n‐type GaP this technique yields excellent results.Keywords
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