Impact, Friction, and Wear Testing of Microsamples of Polycrystalline Silicon
- 1 January 1992
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Polysilicon micro vibromotorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1992
- In situ friction and wear measurements in integrated polysilicon mechanismsSensors and Actuators A: Physical, 1990
- Friction and wear in microfabricated harmonic side-drive motorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1990
- Resonant-structure Micromotors: Historical Perspective and AnalysisSensors and Actuators, 1989
- IC-processed electrostatic synchronous micromotorsSensors and Actuators, 1989
- Laterally Driven Polysilicon Resonant MicrostructuresSensors and Actuators, 1989