Sputtering of solicon and germanium by middle-energy heavy ions
- 14 February 1972
- journal article
- Published by Elsevier in Physics Letters A
- Vol. 38 (4), 237-238
- https://doi.org/10.1016/0375-9601(72)90059-x
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- The ejection of atomic particles from ion bombarded solidsAdvances in Physics, 1970
- Sputtering Experiments with 1- to 5-keV Ar+ IonsJournal of Applied Physics, 1963