The reflected beam sputter source
- 15 March 1977
- journal article
- Published by Elsevier in Nuclear Instruments and Methods
- Vol. 141 (3), 519-520
- https://doi.org/10.1016/0029-554x(77)90647-4
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- A close to universal negative ion sourceNuclear Instruments and Methods, 1974