Electron Holography Surmounts Resolution Limit of Electron Microscopy

Abstract

In high resolution electron off-axis holography, the complete information about amplitude and phase of the complex electron image wave is captured in a single hologram, fed to a computer, numerically reconstructed, and analyzed using methods of wave optical image processing. Specifically, the blurring effect due to the aberration of the objective lens of the electron microscope is corrected under reconstruction. The presented first results, achieved with a Philips CM30FEG electron microscope specially developed for the needs of high resolution electron holography, reveal that the point resolution of modern electron microscopes is significantly improved.