Improved activation of boron-dopant atoms implanted into diamond
- 1 December 1988
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 35 (3-4), 484-487
- https://doi.org/10.1016/0168-583x(88)90316-3
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
- Volume expansion of diamond during ion implantationPhysical Review B, 1986
- Effective p-type doping of diamond by boron ion implantationJournal of Applied Physics, 1983
- Ion implantation into diamondRadiation Effects, 1978
- Semiconducting diamondPhysica Status Solidi (a), 1975
- Radiation induced defects in diamondRadiation Effects, 1971