Charge-Discharge Performance of Electron-Beam-Deposited Tin Oxide Thin-Film Electrodes

Abstract

Electron‐beam‐deposited tin oxide films or less thick were studied for use as negative electrodes for thin‐film lithium‐ion rechargeable batteries. The oxide films were prepared at different thicknesses and heat‐treatment conditions (temperature and time), and were characterized by X‐ray diffraction analysis, Auger electron spectroscopy, and atomic force microscopy. The performance of these films, exhibiting capacities higher than over more than 100 cycles, were found to depend on the heat‐treatment temperatures which influence the structure, grain size, and adhesion to the substrate. ©1999 The Electrochemical Society