Oxygen transport in magnetic Czochralski growth of silicon
- 1 March 1987
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 82 (3), 465-476
- https://doi.org/10.1016/0022-0248(87)90339-3
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Flow patterns in a magnetic Czochralski crystal growth systemJournal of Crystal Growth, 1985
- Buoyancy-Driven Flows in Crystal-Growth MeltsAnnual Review of Fluid Mechanics, 1985
- Melt temperature fluctuations: Causes and response of the solidification frontAdvances In Space Research, 1983
- Dynamic Oxygen Equilibrium in Silicon Melts during Crystal Growth by the Czochralski TechniqueJournal of the Electrochemical Society, 1982