Deposition Rate and Phosphorus Concentration of Phosphosilicate Glass Films in Relation to PH 3 / SiH4 + PH 3 Mole Fraction
- 1 January 1975
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 122 (1), 157-158
- https://doi.org/10.1149/1.2134147