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A substrate temperature measurement system for use during rf diode sputtering
Home
Publications
A substrate temperature measurement system for use during rf diode sputtering
A substrate temperature measurement system for use during rf diode sputtering
JS
J. E. Snyder
J. E. Snyder
MK
M. H. Kryder
M. H. Kryder
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1 April 1989
journal article
Published by
AIP Publishing
in
Review of Scientific Instruments
Vol. 60
(4)
,
749-751
https://doi.org/10.1063/1.1141013
Abstract
No abstract available
Keywords
TEMPERATURE MEASUREMENT
Cited by 3 articles