The fabrication of low loss single mode integrated optical waveguides by the implantation of He+ ions in LiNbO3 is reported. An assessment is made of the processing requirements in terms of implantation energy, ion dose and annealing parameters. Consideration is also given to the use of multienergy implants as a means of improving isolation between waveguide and substrate. Results on single mode planar waveguides show propagation losses below 1 dB cm−1 for laser light of 632.8 nm wavelength.