Spontaneous Hydrogenation of Ti Films Evaporated on NaCl Substrates II
- 1 October 1990
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 29 (10A), L1904
- https://doi.org/10.1143/jjap.29.l1904
Abstract
The growth and structure of Ti films evaporated on ultra-high-vacuum- and air-cleaved NaCl substrates at room temperature have been studied by reflection high-energy electron diffraction. The 2 nm-thick film on the former showed bcc- and CaF2-type (TiH1.5) reflections while that on the latter showed TiH1.5 ones immediately after the evaporation. Judging from the lattice parameter (0.33 nm), the bcc crystallite was analyzed to be β-Ti. This is the first observation of β-Ti grown in evaporated Ti films. The β-Ti changed into TiH1.5 with time. This spontaneous hydrogenation mechanism of the evaporated Ti films is discussed.Keywords
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