A medium energy facility for variable temperature implantation and analysis
- 1 October 1981
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research
- Vol. 189 (1), 193-198
- https://doi.org/10.1016/0029-554x(81)90145-2
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
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