Terahertz waveguide components fabricated using a 3D x-ray microfabrication technique

Abstract

A novel process using embedded x-ray masks that allows the fabrication of 3D terahertz waveguide components is demonstrated. X-rays produced by a laser plasma source are used to expose a chemically amplified resist. To produce structures with the required depth (~50 µm) a cyclic exposure and development technique is used. A representative waveguide cavity intended for operation at 2.5 THz is realised.