Formation of buried carbon nitride by high dose nitrogen implantation into carbon thin film
- 1 November 1995
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 103 (3), 309-312
- https://doi.org/10.1016/0168-583x(95)00615-x
Abstract
No abstract availableKeywords
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