Novel C-MOS compatible monolithic silicon gas flow sensor with porous silicon thermal isolation
- 1 August 1999
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 76 (1-3), 133-138
- https://doi.org/10.1016/s0924-4247(98)00370-7
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
- Influence Of Design Geometry And Packaging On The Response Of Thermal Cmos Flow SensorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- Frontside bulk silicon micromachining using porous-silicon technologySensors and Actuators A: Physical, 1998
- A high sensitivity CMOS gas flow sensor on a thin dielectric membraneSensors and Actuators A: Physical, 1993
- An integrated mass flow sensor with on-chip CMOS interface circuitryIEEE Transactions on Electron Devices, 1992
- Silicon thermal flow sensorsSensors and Actuators A: Physical, 1992
- High-sensivity 2-D flow sensor with an etched thermal isolation structureSensors and Actuators A: Physical, 1990
- CHARACTERISICS OF POLYSILICON LAYERS AND THEIR APPLICATIONS IN SENSORSPublished by Transducer Research Foundation Inc. (TRF) ,1986
- Fast-response silicon flow sensor with an on-chip fluid temperature sensing elementIEEE Transactions on Electron Devices, 1986
- FIPOS (Full Isolation by Porous Oxidized Silicon) technology and its application to LSI'sIEEE Transactions on Electron Devices, 1984