Detection of Surface Response to Chemical/Mechanical Planarization of Silica Films
- 1 January 1992
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Caractérisation des surfaces par réflexion rasante de rayons X. Application à l'étude du polissage de quelques verres silicatesRevue de Physique Appliquée, 1980