Uniaxially strained ZnO/SiO2/Si SAW resonators
- 1 January 1982
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 18 (24), 1030-1031
- https://doi.org/10.1049/el:19820705
Abstract
Surface-acoustic-wave (SAW) resonators fabricated on a ZnO/SiO2/Si layered medium have been cantilever-mounted. By deflecting the free end of the substrate, uniaxial biasing strains are induced in the SAW resonator. The effect of these static strains on resonant frequency and SAW phase velocity is assessed.Keywords
This publication has 1 reference indexed in Scilit:
- Theory of Elasticity (3rd ed.)Journal of Applied Mechanics, 1970