Experimental investigation of shape changes in electrochemical micromachining through photoresist masks
- 1 April 1989
- journal article
- Published by Elsevier in Precision Engineering
- Vol. 11 (2), 79-82
- https://doi.org/10.1016/0141-6359(89)90056-1
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Fabrication of fine apertures in metal foils by photoelectrochemical millingPrecision Engineering, 1986