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Abstract:
I
n
s
i
t
u
analysis of plasma-grown oxides using a spectroscopic ellipsometer
Home
Publications
Abstract:
I
n
s
i
t
u
analysis of plasma-grown oxides using a spectroscopic ellipsometer
Abstract:
I
n
s
i
t
u
analysis of plasma-grown oxides using a spectroscopic ellipsometer
JT
J. B. Theeten
J. B. Theeten
RC
R. P. H. Chang
R. P. H. Chang
TA
T. E. Adams
T. E. Adams
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1 March 1979
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science and Technology
Vol. 16
(2)
,
216
https://doi.org/10.1116/1.569911
Abstract
No abstract available
Cited by 1 article