Data structuring for process and device simulations

Abstract

Process and device simulators are becoming more and more complex because of the increasing need for multidimensional simulation of (sub)micrometer structures. Programs must be maintainable because of the high development cost. Moreover, because input and output data may have to be updated, connections between different simulators, and between simulators and graphical pre- and postprocessors, must be as automatic and flexible as possible. To meet these needs, a data structuring proposal in the field of numerical simulation for computer-aided design is presented. A software library for management of such structures in a Fortran 77 environment is briefly presented