Device Photolithography: The Electron Beam Pattern Generator
- 1 November 1970
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Bell System Technical Journal
- Vol. 49 (9), 2077-2094
- https://doi.org/10.1002/j.1538-7305.1970.tb02514.x
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- 1.75-GHz ACOUSTIC-SURFACE-WAVE TRANSDUCER FABRICATED BY AN ELECTRON BEAMApplied Physics Letters, 1969
- A Shielded Facility for Low-Level Magnetic MeasurementsJournal of Applied Physics, 1967
- Design of a room-size magnetic shieldJournal of Geophysical Research, 1962