Angular distribution measurements of sputtered Au atoms with quartz oscillator microbalances
- 15 June 1981
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research
- Vol. 185 (1-3), 533-537
- https://doi.org/10.1016/0029-554x(81)91252-0
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- The angular variation of the sputter yield peak for silica glass targetsJournal of Applied Physics, 1977
- Angular distribution measurements of sputtered atoms with characteristic X-ray emissionNuclear Instruments and Methods, 1976
- Resputtering effects by measurements of angular distributionsThe European Physical Journal A, 1973
- Angular Distribution of Sputtered MaterialJournal of Applied Physics, 1960