Digital recording of Auger profile and N′ (E) vs E spectral data is shown to enhance in−depth profile analyses, chemical combination studies, and quantitative analyses. Two instrumental schemes are described which output data either on paper tape or magnetic tape. The digitized data were processed with both large real−time or time−share computers. Some of the software operations employed include integration, smoothing, normalization, and plotting. Four advantages realized are: (i) no limit to the number of elements profiled; (ii) unexpected elements present in a profiled layer are not missed; (iii) chemical effects on Auger spectra can be observed as a function of depth; and (iv) comparison of spectra is greatly facilitated.