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Technology of ion beam sources used in sputtering
Home
Publications
Technology of ion beam sources used in sputtering
Technology of ion beam sources used in sputtering
HK
Harold R. Kaufman
Harold R. Kaufman
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1 March 1978
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science and Technology
Vol. 15
(2)
,
272-276
https://doi.org/10.1116/1.569569
Abstract
No abstract available
Keywords
TECHNOLOGY ASSESSMENT
IONIZATION CHAMBER
ION BEAM
SPUTTERING
Cited by 128 articles